We are pleased to announce the launch of our new High-Pressure Pump Series, designed for dispensing high-viscosity chemicals.

The series improves pressure resistance while utilizing KOGANEI’s proprietary Tubephragm structure. With a maximum discharge pressure of 0.5 MPa, it is suitable for dispensing high-viscosity chemicals such as polyimide, as well as for applications with high piping resistance.

It also maintains excellent bubble discharge performance, fluid replacement characteristics, and low-particle performance, enabling highly precise dispensing.

The series is ideal for applications requiring high repeatability and linearity, including wafer coating in semiconductor manufacturing processes, as well as chemical filling, metering, and mixing.

For more information, please refer to the product catalog.